Amorphous hydrogenated carbon films deposited with an expanding thermal plasma

J.W.A.M. Gielen, P.R.M. Kleuskens, M.J. Zande, van der, A.G.M. Kiers, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 42nd national symposium, Minneapolis, October 16-20, 1995, final program
Pages212
Publication statusPublished - 1995

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