AML: a visual programming language for ASM lithography

T.F. Albu

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Bloo, Roel, Supervisor van Lierop, H.P.J., External supervisor Kruijswijk, L.B., External supervisor, External person
Award date	1 Jan 2003
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	90-444-0260-9
Publication status	Published - 2003

Eindverslag, confidential

Cite this

@phdthesis{3284af51a89b4d50bf39fc99987df049,

title = "AML: a visual programming language for ASM lithography",

author = "T.F. Albu",

note = "Eindverslag, confidential",

year = "2003",

language = "English",

isbn = "90-444-0260-9",

series = "Eindverslagen Stan Ackermans Instituut",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}