AML: a visual programming language for ASM lithography

T.F. Albu, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Master of Technological Design (MTD)

Research output: ThesisPd Eng Thesis

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
Supervisors/Advisors
  • Bloo, Roel, Supervisor
  • van Lierop, H.P.J., External supervisor
  • Kruijswijk, L.B., External supervisor, External person
Award date1 Jan 2003
Place of PublicationEindhoven
Publisher
Print ISBNs90-444-0260-9
Publication statusPublished - 2003

Bibliographical note

Eindverslag, confidential

Cite this

Albu, T. F., & Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Master of Technological Design (MTD) (2003). AML: a visual programming language for ASM lithography. Technische Universiteit Eindhoven.