ALWAYS : a system for wafer yield analysis : report and user's manual

J. Pineda de Gyvez

ALWAYS : a system for wafer yield analysis : report and user's manual

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Abstract

An interactive cnvironmenl for the analysis of yield infonmation necded on modem integratcd circuit manufacturing lines is prcsented. The system is ahlc to quantify wafer yiclds, yield variations betwccn wafers and within the wafers themselves, yields of wafer hatchcs, yield variations between batclles, to idemify clusters in wafers and or in lots, and is also able to predict wafer yields via simple simulation tools. The analysis technique investigates the effect of correlated and uncorrelated sourccs of yield loss. Such infonmation can be used to study the changes in thc technological proccss. Graphical displays in the fonn of wafer maps arc used to represent the spatial distrihution of dice in the wafer. Facilities such as radial and angular distribution analyses, among others, arc provided to examine data, and hypothetical wafer maps arc created to visualise and predict simulated wafer yields.

Original language	English
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 1988

Publication series

Name	EUT Technical Report
Volume	88-E-189

Access to Document

8802866Final published version, 1.18 MB

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@book{3c9728e0e47941d9927a7914f8c254f5,

title = "ALWAYS : a system for wafer yield analysis : report and user's manual",

abstract = "An interactive cnvironmenl for the analysis of yield infonmation necded on modem integratcd circuit manufacturing lines is prcsented. The system is ahlc to quantify wafer yiclds, yield variations betwccn wafers and within the wafers themselves, yields of wafer hatchcs, yield variations between batclles, to idemify clusters in wafers and or in lots, and is also able to predict wafer yields via simple simulation tools. The analysis technique investigates the effect of correlated and uncorrelated sourccs of yield loss. Such infonmation can be used to study the changes in thc technological proccss. Graphical displays in the fonn of wafer maps arc used to represent the spatial distrihution of dice in the wafer. Facilities such as radial and angular distribution analyses, among others, arc provided to examine data, and hypothetical wafer maps arc created to visualise and predict simulated wafer yields.",

author = "{Pineda de Gyvez}, J.",

year = "1988",

language = "English",

series = "EUT Technical Report",

publisher = "Technische Universiteit Eindhoven",

}

TY - BOOK

T1 - ALWAYS : a system for wafer yield analysis : report and user's manual

AU - Pineda de Gyvez, J.

PY - 1988

Y1 - 1988

N2 - An interactive cnvironmenl for the analysis of yield infonmation necded on modem integratcd circuit manufacturing lines is prcsented. The system is ahlc to quantify wafer yiclds, yield variations betwccn wafers and within the wafers themselves, yields of wafer hatchcs, yield variations between batclles, to idemify clusters in wafers and or in lots, and is also able to predict wafer yields via simple simulation tools. The analysis technique investigates the effect of correlated and uncorrelated sourccs of yield loss. Such infonmation can be used to study the changes in thc technological proccss. Graphical displays in the fonn of wafer maps arc used to represent the spatial distrihution of dice in the wafer. Facilities such as radial and angular distribution analyses, among others, arc provided to examine data, and hypothetical wafer maps arc created to visualise and predict simulated wafer yields.

AB - An interactive cnvironmenl for the analysis of yield infonmation necded on modem integratcd circuit manufacturing lines is prcsented. The system is ahlc to quantify wafer yiclds, yield variations betwccn wafers and within the wafers themselves, yields of wafer hatchcs, yield variations between batclles, to idemify clusters in wafers and or in lots, and is also able to predict wafer yields via simple simulation tools. The analysis technique investigates the effect of correlated and uncorrelated sourccs of yield loss. Such infonmation can be used to study the changes in thc technological proccss. Graphical displays in the fonn of wafer maps arc used to represent the spatial distrihution of dice in the wafer. Facilities such as radial and angular distribution analyses, among others, arc provided to examine data, and hypothetical wafer maps arc created to visualise and predict simulated wafer yields.