All-optical, ultra-high accuracy displacement sensors with detection means

Y.J. Bellouard, A.A. Said, M. Dugan, P. Bado

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Abstract

This paper reports a novel approach based on femtosecond laser processing to design micro-mechanical sensors such as force and displacement sensors. The basic concept is to combine integrated optics and mechanical functions in a single piece of glass. It differs from previous micro displacement sensor works in that the measured variable is optical rather than electrically based (strain-resistive, piezo-electric, etc.). Furthermore, a single process is used to define both the optical and the mechanical features. This significantly simplifies the overall fabrication and eliminates alignment issues associated with sequential fabrication processes.
Original languageEnglish
Title of host publicationTechnologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II : 26 - 28 September, Bruges, Belgium
EditorsD.H. Titterton, S.M. Kirkpatrick, R. Stoian, R. Appleby, J. Martyn
Place of PublicationBellingham, Wash.
PublisherSPIE
Pagesp. 258-271
ISBN (Print)0-8194-6011-7
DOIs
Publication statusPublished - 2005
Eventconference; Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II -
Duration: 1 Jan 2005 → …

Publication series

NameProceedings of SPIE
Volume5989
ISSN (Print)0277-786X

Conference

Conferenceconference; Technologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II
Period1/01/05 → …
OtherTechnologies for optical countermeasures II; femtosecond phenomena II; and passive millimetre-wave and terahertz imaging II

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