ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

H.C.M. Knoops; M.E. Donders; L. Baggetto; M.C.M. Sanden, van de; R.A.H. Niessen; P.H.L. Notten; W.M.M. Kessels

ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

H.C.M. Knoops, M.E. Donders, L. Baggetto, M.C.M. Sanden, van de, R.A.H. Niessen, P.H.L. Notten, W.M.M. Kessels

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Editors	W.M.M. Kessels, A. Delabie
Place of Publication	S.n.
Publisher	s.n.
Pages	WedA2b-4-
Publication status	Published - 2008

Cite this

Knoops, H. C. M., Donders, M. E., Baggetto, L., Sanden, van de, M. C. M., Niessen, R. A. H., Notten, P. H. L., & Kessels, W. M. M. (2008). ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. WedA2b-4-). s.n..

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title = "ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier",

author = "H.C.M. Knoops and M.E. Donders and L. Baggetto and {Sanden, van de}, M.C.M. and R.A.H. Niessen and P.H.L. Notten and W.M.M. Kessels",

year = "2008",

language = "English",

pages = "WedA2b--4--",

editor = "W.M.M. Kessels and A. Delabie",

booktitle = "Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)",

publisher = "s.n.",

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Knoops, HCM, Donders, ME, Baggetto, L, Sanden, van de, MCM, Niessen, RAH, Notten, PHL & Kessels, WMM 2008, ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. in WMM Kessels & A Delabie (eds), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., pp. WedA2b-4-.

ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier. / Knoops, H.C.M.; Donders, M.E.; Baggetto, L. et al.
Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). ed. / W.M.M. Kessels; A. Delabie. S.n.: s.n., 2008. p. WedA2b-4-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - ALD for 3D-integrated batteries : TiN AS Li-diffusion barrier

AU - Knoops, H.C.M.

AU - Donders, M.E.

AU - Baggetto, L.

AU - Sanden, van de, M.C.M.

AU - Niessen, R.A.H.

AU - Notten, P.H.L.

AU - Kessels, W.M.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - WedA2b-4-

BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -