ALD, ALE and 2D Materials: atomic scale processing for optoelectronics applications

H.C.M. Knoops

doi:10.1364/ACPC.2017.S3J.6

ALD, ALE and 2D Materials: atomic scale processing for optoelectronics applications

H.C.M. Knoops

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Many applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.

Original language	English
Title of host publication	Asia Communications and Photonics Conference, ACPC 2017, 10-13 November 2017, Guangzhou, China
Place of Publication	s.l.
Publisher	Optical Society of America (OSA)
Number of pages	1
ISBN (Print)	978-1-943580-34-7
DOIs	https://doi.org/10.1364/ACPC.2017.S3J.6
Publication status	Published - 2017
Event	2017 Asia Communications and Photonics Conference, ACP 2017 - Garden Hotel, Guangzhou, China Duration: 10 Nov 2017 → 13 Nov 2017 http://www.acpconf.org/

Conference

Conference	2017 Asia Communications and Photonics Conference, ACP 2017
Abbreviated title	ACP 2017
Country/Territory	China
City	Guangzhou
Period	10/11/17 → 13/11/17
Internet address	http://www.acpconf.org/

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@inproceedings{a00e15e8761c459186abeb5ee46cca32,

title = "ALD, ALE and 2D Materials: atomic scale processing for optoelectronics applications",

abstract = "Many applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.",

author = "H.C.M. Knoops",

year = "2017",

doi = "10.1364/ACPC.2017.S3J.6",

language = "English",

isbn = "978-1-943580-34-7",

booktitle = "Asia Communications and Photonics Conference, ACPC 2017, 10-13 November 2017, Guangzhou, China",

publisher = "Optical Society of America (OSA)",

address = "United States",

note = "2017 Asia Communications and Photonics Conference, ACP 2017, ACP 2017 ; Conference date: 10-11-2017 Through 13-11-2017",

url = "http://www.acpconf.org/",

}

Knoops, HCM 2017, ALD, ALE and 2D Materials: atomic scale processing for optoelectronics applications. in Asia Communications and Photonics Conference, ACPC 2017, 10-13 November 2017, Guangzhou, China., S3.J.6, Optical Society of America (OSA), s.l., 2017 Asia Communications and Photonics Conference, ACP 2017, Guangzhou, China, 10/11/17. https://doi.org/10.1364/ACPC.2017.S3J.6

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T1 - ALD, ALE and 2D Materials

T2 - 2017 Asia Communications and Photonics Conference, ACP 2017

AU - Knoops, H.C.M.

PY - 2017

Y1 - 2017

N2 - Many applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.

AB - Many applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.

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U2 - 10.1364/ACPC.2017.S3J.6

DO - 10.1364/ACPC.2017.S3J.6

M3 - Conference contribution

AN - SCOPUS:85041673739

SN - 978-1-943580-34-7

BT - Asia Communications and Photonics Conference, ACPC 2017, 10-13 November 2017, Guangzhou, China

PB - Optical Society of America (OSA)

CY - s.l.

Y2 - 10 November 2017 through 13 November 2017

ER -

ALD, ALE and 2D Materials: atomic scale processing for optoelectronics applications

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