Aggregate modelling of semiconductor equipment using effective process times

L.F.P. Etman, C.P.L. Veeger, A.A.J. Lefeber, I.J.B.F. Adan, J.E. Rooda

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Performance evaluation using queuing models is common practice in semiconductor manufacturing. Analytical closed-form expressions and simulations models are popular in capacity planning and the analysis of equipment configurations. However, the complexity of semiconductor processes complicates the modeling of the equipment. Analytical models lack the required accuracy, whereas simulation models require too many details, making them impractical. Aggregation is a way to overcome this difficulty. The various details are not modeled in detail, but their contribution is lumped in the aggregate model, which makes the model more appropriate for both analysis and simulation. This paper gives an overview of our efforts to develop a top-down aggregate modeling approach for semiconductor equipment, starting from the effective process time concept inspired by the Factory Physics book of Hopp and Spearman. In our modeling approach the aggregate model parameters can be estimated directly from industrial data, without the need to quantify the various details.
Original languageEnglish
Title of host publicationProceedings of the 2011 Winter Simulation Conference, 11-14 december 2011, Phoenix, Arizona
EditorsS. Jain, R.R. Creasey, J. Himmelspach, K. White, M. Fu
Publication statusPublished - 2011
Event2011 Winter Simulation Conference, WSC 2011 - Phoenix, AZ, United States
Duration: 11 Dec 201114 Dec 2011


Conference2011 Winter Simulation Conference, WSC 2011
Abbreviated titleWSC 2011
Country/TerritoryUnited States
CityPhoenix, AZ


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