Original language | English |
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Title of host publication | MRS Spring meeting 2001, April 16-20, San Francisco, abstracts |
Pages | 12 |
Publication status | Published - 2001 |
Advanced spectroscopic study of the densities and kinetics of SiHx radicals during high-rate plasma deposition of a-Si:H
J.P.M. Hoefnagels, W.M.M. Kessels, A.A.E. Stevens, D.C. Schram, M.C.M. Sanden, van de
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic