Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

F. Roozeboom (Editor), Mehmet C. Ozturk (Editor), E.P. Gusev (Editor), D.-L. Kwong (Editor), L.J. Chen (Editor), P.J. Timans (Editor)

Research output: Book/ReportBook editingAcademic

Original languageEnglish
Place of PublicationPennington, N.J.
PublisherElectrochemical Society, Inc.
Number of pages480
ISBN (Print)1-56677-396-2
Publication statusPublished - 1 Jan 2003
Externally publishedYes

Publication series

NameElectrochemical Society : proceedings
ISSN (Print)0161-6374

Cite this