Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

F. Roozeboom (Editor), Mehmet C. Ozturk (Editor), E.P. Gusev (Editor), D.-L. Kwong (Editor), L.J. Chen (Editor), P.J. Timans (Editor)

Research output: Book/Report › Book editing › Academic

Original language	English
Place of Publication	Pennington, N.J.
Publisher	Electrochemical Society, Inc.
Number of pages	480
ISBN (Print)	1-56677-396-2
Publication status	Published - 1 Jan 2003
Externally published	Yes

Name	Electrochemical Society : proceedings
Volume	2003-14
ISSN (Print)	0161-6374

Cite this

@book{d6171ffba9d34cc194bb8619c841c02a,

title = "Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium",

editor = "F. Roozeboom and Ozturk, {Mehmet C.} and E.P. Gusev and D.-L. Kwong and L.J. Chen and P.J. Timans",

year = "2003",

month = jan,

day = "1",

language = "English",

isbn = "1-56677-396-2",

series = "Electrochemical Society : proceedings",

publisher = "Electrochemical Society, Inc.",

address = "United States",

}

Pennington, N.J. : Electrochemical Society, Inc., 2003. 480 p. (Electrochemical Society : proceedings; Vol. 2003-14).

Research output: Book/Report › Book editing › Academic

TY - BOOK

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PY - 2003/1/1

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M3 - Book editing

SN - 1-56677-396-2

T3 - Electrochemical Society : proceedings

BT - Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

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CY - Pennington, N.J.

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