Advanced short-time thermal processing for Si-based CMOS devices II : proceedings of the international symposium

Mehmet C. Ozturk (Editor), E.P. Gusev (Editor), L.J. Chen (Editor), D.-L. Kwong (Editor), P.J. Timans (Editor), G. Miner (Editor), F. Roozeboom (Editor)

Research output: Book/ReportBook editingAcademic

Original languageEnglish
Place of PublicationPennington, N.J.
PublisherElectrochemical Society, Inc.
Number of pages428
ISBN (Print)1-56677-406-3
Publication statusPublished - 1 Jan 2004
Externally publishedYes

Publication series

NameElectrochemical Society : proceedings
ISSN (Print)0161-6374

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