Advanced gate stack, source/drain and channel engineering for Si-based CMOS 6 : new materials, processes and equipment

E.P. Gusev (Editor), H. Iwai (Editor), D.-L. Kwong (Editor), M. Öztürk (Editor), F. Roozeboom (Editor), P.J. Timans (Editor), V. Narayanan (Editor)

Research output: Book/ReportBook editingAcademic

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Physics & Astronomy