Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

83 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Electrical Engineering
Supervisors/Advisors
  • Weiland, Siep, Promotor
  • van Berkel, Koos, Copromotor
Award date21 Oct 2020
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-5130-9
Publication statusPublished - 21 Oct 2020

Bibliographical note

Proefschrift.

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