Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 21 Oct 2020 |
Place of Publication | Eindhoven |
Publisher | |
Print ISBNs | 978-90-386-5130-9 |
Publication status | Published - 21 Oct 2020 |
Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography
David Petrus Maria van den Hurk
Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
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