Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography

David Petrus Maria van den Hurk

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	Weiland, Siep, Promotor van Berkel, Koos, Copromotor
Award date	21 Oct 2020
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-5130-9
Publication status	Published - 21 Oct 2020

Proefschrift.

Access to Document

@phdthesis{a7e41a6867d04b8b9a34f1728ba7128c,

title = "Active wafer clamp control of wafer heating effects in extreme ultraviolet lithography",

author = "{van den Hurk}, {David Petrus Maria}",

note = "Proefschrift.",

year = "2020",

month = oct,

day = "21",

language = "English",

isbn = "978-90-386-5130-9",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}