Active vibration isolation of metrology frames; a modal decoupled control design

M.F. Heertjes, K. Graaff, de, J.C. van der Toorn

Research output: Contribution to journalArticleAcademicpeer-review

26 Citations (Scopus)
12 Downloads (Pure)

Abstract

For a six degree-of-freedom active vibration isolation system, a control strategy based on modal decoupling is proposed. This has the advantage of controlling the modal directions on a centralized single-input single-output basis. As a consequence, stability and performance can be imposed in each of the modal directions separately. An experimental demonstration is given using a dummy metrology frame. That is, a 1600 kg payload mass supported by three combined pneumatic and Lorentz controlled isolators. With this setup, two unstable modal directions resulting from a high center of gravity are stabilized without compromising performance in any of the remaining directions. In fact, performance in the remaining directions is enhanced using manual loop shaping.
Original languageEnglish
Pages (from-to)223-233
JournalJournal of Vibration and Acoustics
Volume127
Issue number3
DOIs
Publication statusPublished - 2005

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