Active vibration damping of wafer chuck : a feasibility study

A. Toma, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen

Research output: Thesis › EngD Thesis

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution
Supervisors/Advisors	Compter, John, Supervisor van Schothorst, G., External supervisor, External person
Award date	1 Jan 2001
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven. Stan Ackermans Instituut
Print ISBNs	90-444-0112-2
Publication status	Published - 2001

Eindverslag

Cite this

@phdthesis{c052f42a493e421e9e79ea9acd82479e,

title = "Active vibration damping of wafer chuck : a feasibility study",

author = "A. Toma and {Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen}",

note = "Eindverslag",

year = "2001",

language = "English",

isbn = "90-444-0112-2",

publisher = "Technische Universiteit Eindhoven. Stan Ackermans Instituut",

type = "EngD Thesis",

}