Active vibration damping of wafer chuck : a feasibility study

A. Toma, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Mechatronisch ontwerpen

Research output: ThesisPd Eng Thesis

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Compter, John, Supervisor
  • Schothorst, van, G., External supervisor, External person
Award date1 Jan 2001
Place of PublicationEindhoven
Print ISBNs90-444-0112-2
Publication statusPublished - 2001

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