Active contamination control for high-tech equipment and substrates: particle generation

Research output: Thesis › EngD Thesis

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Original language	English
Supervisors/Advisors	Hoefnagels, Johan P.M., Supervisor van den Broek, Kaspar, External supervisor, External person
Award date	3 Oct 2019
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 23 Oct 2019

PDEng thesis. - Confidential

Access to Document

@phdthesis{41dd08ee5f93472a9134e9ac090db0b4,

title = "Active contamination control for high-tech equipment and substrates: particle generation",

author = "Homayoun, \{Mohammad Reza\}",

note = "PDEng thesis. - Confidential",

year = "2019",

month = oct,

day = "23",

language = "English",

series = "PDEng report",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}