Active contamination control for high-tech equipment and substrates: particle generation

Mohammad Reza Homayoun

Research output: ThesisPd Eng Thesis

13 Downloads (Pure)
Original languageEnglish
Supervisors/Advisors
  • Hoefnagels, Johan P.M., Supervisor
  • van den Broek, Kaspar, External supervisor, External person
Award date3 Oct 2019
Place of PublicationEindhoven
Publisher
Publication statusPublished - 23 Oct 2019

Bibliographical note

PDEng thesis. - Confidential

Cite this

Homayoun, M. R. (2019). Active contamination control for high-tech equipment and substrates: particle generation. Eindhoven: Technische Universiteit Eindhoven.
Homayoun, Mohammad Reza. / Active contamination control for high-tech equipment and substrates : particle generation. Eindhoven : Technische Universiteit Eindhoven, 2019.
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title = "Active contamination control for high-tech equipment and substrates: particle generation",
author = "Homayoun, {Mohammad Reza}",
note = "PDEng thesis. - Confidential",
year = "2019",
month = "10",
day = "23",
language = "English",
series = "PDEng report",
publisher = "Technische Universiteit Eindhoven",

}

Active contamination control for high-tech equipment and substrates : particle generation. / Homayoun, Mohammad Reza.

Eindhoven : Technische Universiteit Eindhoven, 2019.

Research output: ThesisPd Eng Thesis

TY - THES

T1 - Active contamination control for high-tech equipment and substrates

T2 - particle generation

AU - Homayoun, Mohammad Reza

N1 - PDEng thesis. - Confidential

PY - 2019/10/23

Y1 - 2019/10/23

M3 - Pd Eng Thesis

T3 - PDEng report

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -

Homayoun MR. Active contamination control for high-tech equipment and substrates: particle generation. Eindhoven: Technische Universiteit Eindhoven, 2019. (PDEng report).