Active and passive spectroscopy in plasma deposition and plasma etching

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Original languageEnglish
Title of host publicationComptes rendus des travaux du 8e colloque international sur les procedes plama, 10-14 juin, 1991, Antibes, Juan-les-Pins, France
Place of PublicationParis
PublisherSociété Française du Vide
Pages1-8
Publication statusPublished - 1991

Publication series

NameLe vide, les couches minces
Volumesuppl. 256

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