Acoustic excitation of mechatronic systems by diffuse acoustic sound fields; Numerical predictions and measurements.

N.B. Roozen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

With the accuracy of metrology frame applications entering the nanometer-range, the necessity arises totackle all types of disturbances. In the process of estimating the relative importance of the different types of disturbances on the machine accuracy, also called dynamic error budgeting, acoustic excitation hasgained more importance, mainly because of the relatively high noise levels of air-conditioning systems in clean rooms ("fabs"). To estimate the dynamic error budget claimed by acoustic excitation already in the design phase of the machine, there is a clear need to predict this type of excitation beforehand. This paper presents a numerical procedure to predict the errors due to acoustic excitation efficiently.To validate the numerical procedure, tests were done on a relatively simple structure consisting of acantilever beam and a base plate that represents the typical structural dynamics of a practical highprecision mechatronic system. The sensitivity of this structure to diffuse acoustic sound field excitation was predicted and measured. A diffuse field excitation was chosen so as to represent the acoustic field present in clean rooms ("fabs") due to air-conditioning systems. The numerical simulations wereperformed using a coupled structural-acoustic simulation, where we developed a novel computationalprocedure to determine the structural response due to diffuse acoustic field. The simulations are comparedwith measurements in a reverberant room.
Original languageEnglish
Title of host publicationproceedings of the 2006 International Conference on Modal Analysis Noise and Vibration Engineering (ISMA 2006), 18 - 20 September 2006, Leuven, Belgium
Place of PublicationHeverlee, Belgium
PublisherKatholieke Universiteit Leuven
Publication statusPublished - 2006
EventInternational Conference on Noise and Vibration Engineering 2006 (ISMA2006), September 18-20, 2006, Leuven, Belgium - Leuven, Belgium
Duration: 18 Sep 200620 Sep 2006

Conference

ConferenceInternational Conference on Noise and Vibration Engineering 2006 (ISMA2006), September 18-20, 2006, Leuven, Belgium
Abbreviated titleISMA2006
CountryBelgium
CityLeuven
Period18/09/0620/09/06

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