Accuracy analysis in multiple angle of incidence ellipsometry

M.K. Smit; J.W. Verhoof

doi:10.1016/0040-6090(90)90448-M

Accuracy analysis in multiple angle of incidence ellipsometry

M.K. Smit
, J.W. Verhoof

Photonic Integration

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Abstract

The accuracy with which film parameters can be determined from ellipsometric measurement data obtained at a limited number of incidence angles is analysed. The analysis is restricted to low loss films on transparent or slightly absorbing substrates. Further, a method is described for estimating the magnitude of random and systematic measurement errors. Results are experimentally verified for thermally grown oxide films on silicon substrates

Original language	English
Pages (from-to)	193-203
Journal	Thin Solid Films
Volume	189
Issue number	2
DOIs	https://doi.org/10.1016/0040-6090(90)90448-M
Publication status	Published - 1990

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title = "Accuracy analysis in multiple angle of incidence ellipsometry",

abstract = "The accuracy with which film parameters can be determined from ellipsometric measurement data obtained at a limited number of incidence angles is analysed. The analysis is restricted to low loss films on transparent or slightly absorbing substrates. Further, a method is described for estimating the magnitude of random and systematic measurement errors. Results are experimentally verified for thermally grown oxide films on silicon substrates",

author = "M.K. Smit and J.W. Verhoof",

year = "1990",

doi = "10.1016/0040-6090(90)90448-M",

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T1 - Accuracy analysis in multiple angle of incidence ellipsometry

AU - Smit, M.K.

AU - Verhoof, J.W.

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AB - The accuracy with which film parameters can be determined from ellipsometric measurement data obtained at a limited number of incidence angles is analysed. The analysis is restricted to low loss films on transparent or slightly absorbing substrates. Further, a method is described for estimating the magnitude of random and systematic measurement errors. Results are experimentally verified for thermally grown oxide films on silicon substrates

U2 - 10.1016/0040-6090(90)90448-M

DO - 10.1016/0040-6090(90)90448-M

M3 - Article

SN - 0040-6090

VL - 189

SP - 193

EP - 203

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2

ER -

Accuracy analysis in multiple angle of incidence ellipsometry

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