Accuracy analysis in multiple angle of incidence ellipsometry

M.K. Smit, J.W. Verhoof

Research output: Contribution to journalArticlePopular

12 Citations (Scopus)
172 Downloads (Pure)


The accuracy with which film parameters can be determined from ellipsometric measurement data obtained at a limited number of incidence angles is analysed. The analysis is restricted to low loss films on transparent or slightly absorbing substrates. Further, a method is described for estimating the magnitude of random and systematic measurement errors. Results are experimentally verified for thermally grown oxide films on silicon substrates
Original languageEnglish
Pages (from-to)193-203
JournalThin Solid Films
Issue number2
Publication statusPublished - 1990


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