Acceleration-snap feedforward scheme for a motion system with viscoelastic tuned-mass-damper

M.F. Heertjes, M.L.J. van de Ven, R. Kamidi

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

Bandwidth-limiting flexible modes in motion systems like the stage systems of a wafer scanner can effectively be damped by incorporating a viscoelastic tuned-mass-damper. This allows for an increase of bandwidth. The viscoelastic properties however pose a challenge on the feedforward design and thereby limit the achievable tracking performance. This is because the viscoelastic properties, which cannot be described by the simple addition of an elastic and a viscous element, induce a relaxation effect that prolongs well beyond the moment that inertial forces induced by the setpoint are being applied to the system. To cope with this problem, a tenth-order model fit from measured frequency response data that sufficiently captures the viscoelastic properties is combined with a data-based optimization approach needed to fine-tune a limited set of acceleration-snap feedforward gains. Experimental results from an industrial wafer stage system demonstrate the applicability of the approach.

Original languageEnglish
Title of host publication2017 American Control Conference, ACC 2017, 24-26 May 2017, Seattle, Washington
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages2888-2893
Number of pages6
ISBN (Electronic)978-1-5090-5992-8
ISBN (Print)978-1-5090-4583-9
DOIs
Publication statusPublished - 29 Jun 2017
Event2017 American Control Conference (ACC 2017) - Sheraton Seattle Hotel, Seattle, United States
Duration: 24 May 201726 May 2017
http://acc2017.a2c2.org/

Conference

Conference2017 American Control Conference (ACC 2017)
Abbreviated titleACC 2017
Country/TerritoryUnited States
CitySeattle
Period24/05/1726/05/17
Internet address

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