Absolute density of the argon first excited states in plasmas used for carbon deposition as determined by absorption spectroscopy

A.J.M. Buuron, D.K. Otorbaev, M.C.M. Sanden, van de, D.C. Schram

Research output: Contribution to journalMeeting AbstractAcademic

6 Citations (Scopus)
87 Downloads (Pure)
Original languageEnglish
Pages (from-to)1271-1276
JournalDiamond and Related Materials
Volume4
Issue number11
DOIs
Publication statusPublished - 1999

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