Cu/SiO2 model catalysts containing nanometer-sized Cu particles on a flat silica model support were wetchemically prepared and characterized in detail by a variety of surface science techniques. The particle size and shape, particle number density, metal surface coverage, total metal loading, and oxidation state of the particles were determined by ultrahigh vacuum atomic force microscopy, electron microscopy, low-energy ion scattering, Rutherford backscattering spectrometry, and X-ray photoelectron spectroscopy. Deposition of a Cu precursor on a flat Si wafer with a SiO2 top layer by spin-coating was followed by calcination in air at 450 °C. This preparation method produces both homogeneously distributed hemispherical CuO particles with an average height of 8 nm and highly dispersed oxidic Cu species. Subsequent reduction in hydrogen at 250 °C results in metallic and more rounded Cu particles with an average height of 8 nm.