A sputtering hollow cathode discharge : modelling and comparison with the experiments

D.B. Mihailova; J. Dijk, van; W.J.M. Brok; M. Grozeva; J.J.A.M. Mullen, van der

A sputtering hollow cathode discharge : modelling and comparison with the experiments

D.B. Mihailova
, J. Dijk, van
, W.J.M. Brok
, M. Grozeva
, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

proceedings/poster 3-87

Original language	English
Title of host publication	Proceedings of the 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (mi), 15-19 July 2008, Granada, Spain
Publisher	European Physical Society (EPS)
Publication status	Published - 2008

Cite this

@inproceedings{dd0dd5d1518e48968c03de39e2b67abf,

title = "A sputtering hollow cathode discharge : modelling and comparison with the experiments",

abstract = "proceedings/poster 3-87",

author = "D.B. Mihailova and \{Dijk, van\}, J. and W.J.M. Brok and M. Grozeva and \{Mullen, van der\}, J.J.A.M.",

year = "2008",

language = "English",

booktitle = "Proceedings of the 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (mi), 15-19 July 2008, Granada, Spain",

publisher = "European Physical Society (EPS)",

}

A sputtering hollow cathode discharge : modelling and comparison with the experiments. / Mihailova, D.B.; Dijk, van, J.; Brok, W.J.M. et al.
Proceedings of the 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (mi), 15-19 July 2008, Granada, Spain. European Physical Society (EPS), 2008.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - A sputtering hollow cathode discharge : modelling and comparison with the experiments

AU - Mihailova, D.B.

AU - Dijk, van, J.

AU - Brok, W.J.M.

AU - Grozeva, M.

AU - Mullen, van der, J.J.A.M.

PY - 2008

Y1 - 2008

N2 - proceedings/poster 3-87

AB - proceedings/poster 3-87

M3 - Conference contribution

BT - Proceedings of the 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases (mi), 15-19 July 2008, Granada, Spain

PB - European Physical Society (EPS)

ER -

A sputtering hollow cathode discharge : modelling and comparison with the experiments

Abstract

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