A sputtering hollow cathode discharge: modelling and comparison with experiments

D.B. Mihailova, J. Dijk, van, J.J.A.M. Mullen, van der, M. Grozeva

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

Abstract A21

Original language	English
Title of host publication	Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands
Publication status	Published - 2009

@inproceedings{2827065523e847dcaee01ccec9e38fb4,

title = "A sputtering hollow cathode discharge: modelling and comparison with experiments",

abstract = "Abstract A21",

author = "D.B. Mihailova and {Dijk, van}, J. and {Mullen, van der}, J.J.A.M. and M. Grozeva",

year = "2009",

language = "English",

booktitle = "Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands",

}

Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands. 2009.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - A sputtering hollow cathode discharge: modelling and comparison with experiments

AU - Mihailova, D.B.

AU - Dijk, van, J.

AU - Mullen, van der, J.J.A.M.

AU - Grozeva, M.

PY - 2009

Y1 - 2009

N2 - Abstract A21

AB - Abstract A21

M3 - Conference contribution

BT - Proceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands

ER -