A sputtering hollow cathode discharge: modelling and comparison with experiments

D.B. Mihailova, J. Dijk, van, J.J.A.M. Mullen, van der, M. Grozeva

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Abstract A21
Original languageEnglish
Title of host publicationProceedings of the 21th NNV-Symposium Plasma Physics & Radiation Technology 2009, 3-4 March 2009, Lunteren, The Netherlands
Publication statusPublished - 2009

Fingerprint Dive into the research topics of 'A sputtering hollow cathode discharge: modelling and comparison with experiments'. Together they form a unique fingerprint.

Cite this