A sputtering hollow cathode discharge : modelling and comparison with experiments

D.B. Mihailova, M. Grozeva, J. Dijk, van, W.J.M. Brok, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands
Publication status	Published - 2008

Cite this

@inproceedings{bae9957414674921a40ae97414505b3c,

title = "A sputtering hollow cathode discharge : modelling and comparison with experiments",

author = "D.B. Mihailova and M. Grozeva and {Dijk, van}, J. and W.J.M. Brok and {Mullen, van der}, J.J.A.M.",

year = "2008",

language = "English",

booktitle = "Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands",

}

TY - GEN

T1 - A sputtering hollow cathode discharge : modelling and comparison with experiments

AU - Mihailova, D.B.

AU - Grozeva, M.

AU - Dijk, van, J.

AU - Brok, W.J.M.

AU - Mullen, van der, J.J.A.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

BT - Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands

ER -