A solution to gain loss in hybrid integrator-gain systems

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Abstract

Hybrid integrator-gain systems (HIGS) are non-linear control elements that are designed to primarily operate as integrators in so-called integrator mode. Switching to gain mode occurs only when needed to keep sign equivalence between the input and output signals of the control element, thereby aiming for phase advantages. In order to guarantee the integrator mode to be the primary mode of operation, in this paper a combined pre- and post-filtering approach is studied. Such an approach offers a solution to the problem of gain loss that occurs when the HIGS switches too often between its modes. Typically, this happens in the presence of dominant high-frequency contributions in the input to the HIGS. Along the discussion on pre- and post-filtering, measurement results are presented from a high-performance industrial stage system.

Original languageEnglish
Title of host publicationCCTA 2021 - 5th IEEE Conference on Control Technology and Applications
PublisherInstitute of Electrical and Electronics Engineers
Pages1179-1184
Number of pages6
ISBN (Electronic)9781665436434
DOIs
Publication statusPublished - 2021
Event5th IEEE Conference on Control Technology and Applications, CCTA 2021 - Online, San Diego, United States
Duration: 8 Aug 202111 Aug 2021
Conference number: 5
https://ccta2021.ieeecss.org/

Conference

Conference5th IEEE Conference on Control Technology and Applications, CCTA 2021
Abbreviated titleCCTA 2021
Country/TerritoryUnited States
CitySan Diego
Period8/08/2111/08/21
Internet address

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Keywords

  • advanced motion control
  • hybrid integrator-gain systems
  • nonlinear PID control
  • wafer scanners

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