Abstract
Hybrid integrator-gain systems (HIGS) are non-linear control elements that are designed to primarily operate as integrators in so-called integrator mode. Switching to gain mode occurs only when needed to keep sign equivalence between the input and output signals of the control element, thereby aiming for phase advantages. In order to guarantee the integrator mode to be the primary mode of operation, in this paper a combined pre- and post-filtering approach is studied. Such an approach offers a solution to the problem of gain loss that occurs when the HIGS switches too often between its modes. Typically, this happens in the presence of dominant high-frequency contributions in the input to the HIGS. Along the discussion on pre- and post-filtering, measurement results are presented from a high-performance industrial stage system.
Original language | English |
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Title of host publication | CCTA 2021 - 5th IEEE Conference on Control Technology and Applications |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 1179-1184 |
Number of pages | 6 |
ISBN (Electronic) | 9781665436434 |
DOIs | |
Publication status | Published - 2021 |
Event | 5th IEEE Conference on Control Technology and Applications, CCTA 2021 - Online, San Diego, United States Duration: 8 Aug 2021 → 11 Aug 2021 Conference number: 5 https://ccta2021.ieeecss.org/ |
Conference
Conference | 5th IEEE Conference on Control Technology and Applications, CCTA 2021 |
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Abbreviated title | CCTA 2021 |
Country/Territory | United States |
City | San Diego |
Period | 8/08/21 → 11/08/21 |
Internet address |
Bibliographical note
Publisher Copyright:© 2021 IEEE.
Keywords
- advanced motion control
- hybrid integrator-gain systems
- nonlinear PID control
- wafer scanners