A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm

H. Haitjema, W.O. Pril, P.H.J. Schellekens

Research output: Contribution to journalArticleAcademicpeer-review

26 Citations (Scopus)

Abstract

The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs will be given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes will be given and possible future developments will be discussed.
Original languageEnglish
Pages (from-to)1519-1523
JournalIEEE Transactions on Instrumentation and Measurement
Volume50
Issue number6
DOIs
Publication statusPublished - 2001

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