Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 1519-1523 |
| Journal | IEEE Transactions on Instrumentation and Measurement |
| Volume | 50 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2001 |
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A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm. / Haitjema, H.; Pril, W.O.; Schellekens, P.H.J.
In: IEEE Transactions on Instrumentation and Measurement, Vol. 50, No. 6, 2001, p. 1519-1523.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 μm
AU - Haitjema, H.
AU - Pril, W.O.
AU - Schellekens, P.H.J.
PY - 2001
Y1 - 2001
N2 - The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs will be given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes will be given and possible future developments will be discussed.
AB - The increasing demand for accurate coordinate measurements on products demands new concepts of probe design. Results of some realized designs will be given. One of the most promising utilizes microtechnology and etching in silicon in order to realize the necessary dimensional design with flexure hinges. Microtechnology is also used for the detection system; strain gages are integrated in the probe. Results for two probes will be given and possible future developments will be discussed.
U2 - 10.1109/19.982938
DO - 10.1109/19.982938
M3 - Article
VL - 50
SP - 1519
EP - 1523
JO - IEEE Transactions on Instrumentation and Measurement
JF - IEEE Transactions on Instrumentation and Measurement
SN - 0018-9456
IS - 6
ER -