A practical method for the determination of the Young's modulus and residual stresses of PVD thin films

M.D. Tran, J. Poublan, J.H. Dautzenberg

Research output: Contribution to journalArticlePopular

23 Citations (Scopus)
202 Downloads (Pure)
Original languageEnglish
Pages (from-to)310-314
JournalThin Solid Films
Volume308
Issue numberoct
DOIs
Publication statusPublished - 1997

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