A practical method for the determination of the Young's modulus and residual stresses of PVD thin films

M.D. Tran, J. Poublan, J.H. Dautzenberg

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@article{d03aceeab0ff4f0da0e711f08fc2aa2e,

title = "A practical method for the determination of the Young's modulus and residual stresses of PVD thin films",

author = "M.D. Tran and J. Poublan and J.H. Dautzenberg",

year = "1997",

doi = "10.1016/S0040-6090(97)00560-9",

language = "English",

volume = "308",

pages = "310--314",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "oct",

}

TY - JOUR

T1 - A practical method for the determination of the Young's modulus and residual stresses of PVD thin films

AU - Tran, M.D.

AU - Poublan, J.

AU - Dautzenberg, J.H.

PY - 1997

Y1 - 1997

U2 - 10.1016/S0040-6090(97)00560-9

DO - 10.1016/S0040-6090(97)00560-9

M3 - Article

SN - 0040-6090

VL - 308

SP - 310

EP - 314

JO - Thin Solid Films

JF - Thin Solid Films

IS - oct

ER -