A planar motor with electro-dynamic propulsion and levitation under 6 DoF control

J.C. Compter

A planar motor with electro-dynamic propulsion and levitation under 6 DoF control

J.C. Compter

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

An electronically commutated planar motor based on Lorentz forces is described as a potential drive in the highly demanding applications of the semiconductor industry. An extended Halbach array forms the basis of the design. Four three-phase forcers are capable of delivering the required forces to control the planar motor over the six degrees of freedom. The position information required for the electronic commutation is obtained by a number of Hall sensor arrays. The positive results of the prototype testing encourage further use in industrial applications under vacuum conditions.

Original language	English
Title of host publication	Proc. of the 4th Int. Conf. on Linear Drives for Industry Applications
Place of Publication	United Kingdom, Birmingham
Pages	149-152
Publication status	Published - 2003

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title = "A planar motor with electro-dynamic propulsion and levitation under 6 DoF control",

abstract = "An electronically commutated planar motor based on Lorentz forces is described as a potential drive in the highly demanding applications of the semiconductor industry. An extended Halbach array forms the basis of the design. Four three-phase forcers are capable of delivering the required forces to control the planar motor over the six degrees of freedom. The position information required for the electronic commutation is obtained by a number of Hall sensor arrays. The positive results of the prototype testing encourage further use in industrial applications under vacuum conditions.",

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AB - An electronically commutated planar motor based on Lorentz forces is described as a potential drive in the highly demanding applications of the semiconductor industry. An extended Halbach array forms the basis of the design. Four three-phase forcers are capable of delivering the required forces to control the planar motor over the six degrees of freedom. The position information required for the electronic commutation is obtained by a number of Hall sensor arrays. The positive results of the prototype testing encourage further use in industrial applications under vacuum conditions.

M3 - Conference contribution

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EP - 152

BT - Proc. of the 4th Int. Conf. on Linear Drives for Industry Applications

CY - United Kingdom, Birmingham

ER -

A planar motor with electro-dynamic propulsion and levitation under 6 DoF control

Abstract

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