A one dimensional collisional sheath model for a 13.56 MHz RF plasma

P.M. Meijer, P.M. Vallinga

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987
Place of PublicationBristol
PublisherHilger
Pages828-829
Volume4
Publication statusPublished - 1987
Event18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) - Swansea, United Kingdom
Duration: 13 Jul 198717 Jul 1987

Conference

Conference18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)
CountryUnited Kingdom
CitySwansea
Period13/07/8717/07/87

Cite this

Meijer, P. M., & Vallinga, P. M. (1987). A one dimensional collisional sheath model for a 13.56 MHz RF plasma. In ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987 (Vol. 4, pp. 828-829). Bristol: Hilger.
Meijer, P.M. ; Vallinga, P.M. / A one dimensional collisional sheath model for a 13.56 MHz RF plasma. ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4 Bristol : Hilger, 1987. pp. 828-829
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title = "A one dimensional collisional sheath model for a 13.56 MHz RF plasma",
author = "P.M. Meijer and P.M. Vallinga",
year = "1987",
language = "English",
volume = "4",
pages = "828--829",
booktitle = "ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987",
publisher = "Hilger",

}

Meijer, PM & Vallinga, PM 1987, A one dimensional collisional sheath model for a 13.56 MHz RF plasma. in ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. vol. 4, Hilger, Bristol, pp. 828-829, 18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII), Swansea, United Kingdom, 13/07/87.

A one dimensional collisional sheath model for a 13.56 MHz RF plasma. / Meijer, P.M.; Vallinga, P.M.

ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4 Bristol : Hilger, 1987. p. 828-829.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - A one dimensional collisional sheath model for a 13.56 MHz RF plasma

AU - Meijer, P.M.

AU - Vallinga, P.M.

PY - 1987

Y1 - 1987

M3 - Conference contribution

VL - 4

SP - 828

EP - 829

BT - ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987

PB - Hilger

CY - Bristol

ER -

Meijer PM, Vallinga PM. A one dimensional collisional sheath model for a 13.56 MHz RF plasma. In ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4. Bristol: Hilger. 1987. p. 828-829