A one dimensional collisional sheath model for a 13.56 MHz RF plasma

P.M. Meijer, P.M. Vallinga

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987
Place of PublicationBristol
PublisherHilger
Pages828-829
Volume4
Publication statusPublished - 1987
Event18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) - Swansea, United Kingdom
Duration: 13 Jul 198717 Jul 1987

Conference

Conference18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)
CountryUnited Kingdom
CitySwansea
Period13/07/8717/07/87

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