A one dimensional collisional sheath model for a 13.56 MHz RF plasma

P.M. Meijer, P.M. Vallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987
Place of Publication	Bristol
Publisher	Hilger
Pages	828-829
Volume	4
Publication status	Published - 1987
Event	18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) - Swansea, United Kingdom Duration: 13 Jul 1987 → 17 Jul 1987

Conference	18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)
Country	United Kingdom
City	Swansea
Period	13/07/87 → 17/07/87

Cite this

@inproceedings{6713886d3d3a456aa93aafbbeac0e0f1,

title = "A one dimensional collisional sheath model for a 13.56 MHz RF plasma",

author = "P.M. Meijer and P.M. Vallinga",

year = "1987",

language = "English",

volume = "4",

pages = "828--829",

booktitle = "ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987",

publisher = "Hilger",

note = "18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) ; Conference date: 13-07-1987 Through 17-07-1987",

}

TY - GEN

T1 - A one dimensional collisional sheath model for a 13.56 MHz RF plasma

AU - Meijer, P.M.

AU - Vallinga, P.M.

PY - 1987

Y1 - 1987

M3 - Conference contribution

VL - 4

SP - 828

EP - 829

BT - ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987

PB - Hilger

CY - Bristol

T2 - 18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)

Y2 - 13 July 1987 through 17 July 1987

ER -