@inproceedings{6713886d3d3a456aa93aafbbeac0e0f1,
title = "A one dimensional collisional sheath model for a 13.56 MHz RF plasma",
author = "P.M. Meijer and P.M. Vallinga",
year = "1987",
language = "English",
volume = "4",
pages = "828--829",
booktitle = "ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987",
publisher = "Hilger",
note = "18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) ; Conference date: 13-07-1987 Through 17-07-1987",
}