A novel pulsed biasing approach and its benefits for plasma material processing

P. Kudlacek, R.F. Rumphorst, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 12th International Conference on Plasma Surface Engineering : Conference and Exhibition (PSE 2010), September 13-17, 2010, Garmisch-Partenkirchen, Germany (Abstracts)
Place of PublicationS.l.
Publishers.n.
Pages31-31
Publication statusPublished - 2010
Eventconference; 12th International Conference on Plasma Surface Engineering (PSE2010) -
Duration: 1 Jan 2010 → …

Conference

Conferenceconference; 12th International Conference on Plasma Surface Engineering (PSE2010)
Period1/01/10 → …
Other12th International Conference on Plasma Surface Engineering (PSE2010)

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