A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors

R.M. Tiggelaar, J.W. Berenschot, R.E. Oosterbroek, P. Male, van, M.H.J.M. Croon, de, J.C. Schouten, A. Berg, van den, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

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Physics & Astronomy