A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth

G. Dingemans, M.N. van den Donker, A. Gordijn, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA
EditorsE.A. Schiff, B. Nelson, H.M. Branz
PagesTuO5.4-
Publication statusPublished - 2007

Cite this

Dingemans, G., van den Donker, M. N., Gordijn, A., Kessels, W. M. M., & Sanden, van de, M. C. M. (2007). A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. In E. A. Schiff, B. Nelson, & H. M. Branz (Eds.), ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA (pp. TuO5.4-)