A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth

G. Dingemans; M.N. van den Donker; A. Gordijn; W.M.M. Kessels; M.C.M. Sanden, van de

A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth

G. Dingemans, M.N. van den Donker, A. Gordijn, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA
Editors	E.A. Schiff, B. Nelson, H.M. Branz
Pages	TuO5.4-
Publication status	Published - 2007

Cite this

Dingemans, G., van den Donker, M. N., Gordijn, A., Kessels, W. M. M., & Sanden, van de, M. C. M. (2007). A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. In E. A. Schiff, B. Nelson, & H. M. Branz (Eds.), ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA (pp. TuO5.4-)

Dingemans, G. ; van den Donker, M.N. ; Gordijn, A. et al. / A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA. editor / E.A. Schiff ; B. Nelson ; H.M. Branz. 2007. pp. TuO5.4-

@inproceedings{d490a57209db435fa340d982b308f674,

title = "A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth",

author = "G. Dingemans and {van den Donker}, M.N. and A. Gordijn and W.M.M. Kessels and {Sanden, van de}, M.C.M.",

year = "2007",

language = "English",

pages = "TuO5.4--",

editor = "E.A. Schiff and B. Nelson and H.M. Branz",

booktitle = "ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA",

}

Dingemans, G, van den Donker, MN, Gordijn, A, Kessels, WMM & Sanden, van de, MCM 2007, A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. in EA Schiff, B Nelson & HM Branz (eds), ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA. pp. TuO5.4-.

A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. / Dingemans, G.; van den Donker, M.N.; Gordijn, A. et al.
ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA. ed. / E.A. Schiff; B. Nelson; H.M. Branz. 2007. p. TuO5.4-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth

AU - Dingemans, G.

AU - van den Donker, M.N.

AU - Gordijn, A.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - TuO5.4-

BT - ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA

A2 - Schiff, E.A.

A2 - Nelson, B.

A2 - Branz, H.M.

ER -

Dingemans G, van den Donker MN, Gordijn A, Kessels WMM , Sanden, van de MCM. A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth. In Schiff EA, Nelson B, Branz HM, editors, ICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA. 2007. p. TuO5.4-