A new approach to optical emission spectroscopy for studying microcrystalline silicon film growth

G. Dingemans, M.N. van den Donker, A. Gordijn, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationICANS 22 - abstract book : 22nd international conference on amorphous and nanocrystalline semiconductors : August 19-24, 2007, Breckenridge, Colorado, USA
EditorsE.A. Schiff, B. Nelson, H.M. Branz
Publication statusPublished - 2007

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