A new approach of plasma deposition

G.M.W. Kroesen, T.H.J. Bisschops, J.C.M. de Haas, D.C. Schram, C.J. Timmermans

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .
Original languageEnglish
Title of host publicationISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2
EditorsC.J. Timmermans
PublisherInternational Union of Pure and Applied Chemistry
Publication statusPublished - 1985


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