A new approach of plasma deposition

G.M.W. Kroesen; T.H.J. Bisschops; J.C.M. de Haas; D.C. Schram; C.J. Timmermans

A new approach of plasma deposition

G.M.W. Kroesen, T.H.J. Bisschops, J.C.M. de Haas, D.C. Schram, C.J. Timmermans

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .

Original language	English
Title of host publication	ISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2
Editors	C.J. Timmermans
Publisher	International Union of Pure and Applied Chemistry
Pages	698-703
Publication status	Published - 1985

Cite this

@inproceedings{cf6db0e7f0d641948c22c55aa343e395,

title = "A new approach of plasma deposition",

abstract = "A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .",

author = "G.M.W. Kroesen and T.H.J. Bisschops and {de Haas}, J.C.M. and D.C. Schram and C.J. Timmermans",

year = "1985",

language = "English",

pages = "698--703",

editor = "C.J. Timmermans",

booktitle = "ISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2",

publisher = "International Union of Pure and Applied Chemistry",

}

A new approach of plasma deposition. / Kroesen, G.M.W.; Bisschops, T.H.J.; de Haas, J.C.M. et al.
ISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2. ed. / C.J. Timmermans. International Union of Pure and Applied Chemistry, 1985. p. 698-703.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A new approach of plasma deposition

AU - Kroesen, G.M.W.

AU - Bisschops, T.H.J.

AU - de Haas, J.C.M.

AU - Schram, D.C.

AU - Timmermans, C.J.

PY - 1985

Y1 - 1985

N2 - A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .

AB - A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .

M3 - Conference contribution

SP - 698

EP - 703

BT - ISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2

A2 - Timmermans, C.J.

PB - International Union of Pure and Applied Chemistry

ER -

A new approach of plasma deposition

Abstract

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