A plasma deposition experiment is described , based on supersonic expansion of the thermal plasma of a cascaded arc . The dissociation of the original gas is in this case spatially separated from the place where the deposition takes place. Results of the first measurements on the plasma parameters are presented .
|Title of host publication||ISPC-7 7th International Symposium on Plasma Chemistry, Eindhoven, the Netherlands July 1-5 1985 : symposium proceedings : vol. 2|
|Publisher||International Union of Pure and Applied Chemistry|
|Publication status||Published - 1985|