A model-based inferential feedforward approach to deal with hysteresis in a motion system

Raaja Ganapathy Subramanian, Marcel Heertjes, Thomas de Hoog

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
2 Downloads (Pure)

Abstract

This paper discusses a nonlinear Kelvin-Voigt-based (hysteresis) disturbance force model used in the estimation and compensation of both the hysteresis and dynamic forces caused by a cable-slab-stage system. The hysteresis model features rate-, position- and direction-dependent properties while also taking into account the time-varying/moving mass effect that is introduced by the motion of the cable slab. In terms of control, a model-based inferential feedforward approach is pursued that aims at attenuation of the hysteresis phenomenon such as experienced at the point-of-interest. The potential benefits of the proposed approach will be demonstrated by means of measurement results obtained from a sensor stage of an industrial in-line metrology system.

Original languageEnglish
Title of host publication2018 Annual American Control Conference, ACC 2018
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages2934-2939
Number of pages6
ISBN (Electronic)978-1-5386-5428-6
ISBN (Print)978-1-5386-5429-3
DOIs
Publication statusPublished - 9 Aug 2018
Event2018 Annual American Control Conference, (ACC2018) - Milwauke, United States
Duration: 27 Jun 201829 Jun 2018
http://acc2018.a2c2.org/
http://acc2018.a2c2.org/

Conference

Conference2018 Annual American Control Conference, (ACC2018)
Abbreviated titleACC2018
CountryUnited States
CityMilwauke
Period27/06/1829/06/18
Internet address

Fingerprint Dive into the research topics of 'A model-based inferential feedforward approach to deal with hysteresis in a motion system'. Together they form a unique fingerprint.

  • Cite this

    Subramanian, R. G., Heertjes, M., & de Hoog, T. (2018). A model-based inferential feedforward approach to deal with hysteresis in a motion system. In 2018 Annual American Control Conference, ACC 2018 (pp. 2934-2939). Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/ACC.2018.8431580