A model-based inferential feedforward approach to deal with hysteresis in a motion system

Raaja Ganapathy Subramanian, Marcel Heertjes, Thomas de Hoog

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
2 Downloads (Pure)


This paper discusses a nonlinear Kelvin-Voigt-based (hysteresis) disturbance force model used in the estimation and compensation of both the hysteresis and dynamic forces caused by a cable-slab-stage system. The hysteresis model features rate-, position- and direction-dependent properties while also taking into account the time-varying/moving mass effect that is introduced by the motion of the cable slab. In terms of control, a model-based inferential feedforward approach is pursued that aims at attenuation of the hysteresis phenomenon such as experienced at the point-of-interest. The potential benefits of the proposed approach will be demonstrated by means of measurement results obtained from a sensor stage of an industrial in-line metrology system.

Original languageEnglish
Title of host publication2018 Annual American Control Conference, ACC 2018
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)978-1-5386-5428-6
ISBN (Print)978-1-5386-5429-3
Publication statusPublished - 9 Aug 2018
Event2018 American Control Conference (ACC 2018) - Hilton Milwaukee City Center Hotel, Milwaukee, Wisconsin, United States
Duration: 27 Jun 201829 Jun 2018


Conference2018 American Control Conference (ACC 2018)
Abbreviated titleACC 2018
Country/TerritoryUnited States
CityMilwaukee, Wisconsin
Internet address


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