Abstract
This paper discusses a nonlinear Kelvin-Voigt-based (hysteresis) disturbance force model used in the estimation and compensation of both the hysteresis and dynamic forces caused by a cable-slab-stage system. The hysteresis model features rate-, position- and direction-dependent properties while also taking into account the time-varying/moving mass effect that is introduced by the motion of the cable slab. In terms of control, a model-based inferential feedforward approach is pursued that aims at attenuation of the hysteresis phenomenon such as experienced at the point-of-interest. The potential benefits of the proposed approach will be demonstrated by means of measurement results obtained from a sensor stage of an industrial in-line metrology system.
| Original language | English |
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| Title of host publication | 2018 Annual American Control Conference, ACC 2018 |
| Place of Publication | Piscataway |
| Publisher | Institute of Electrical and Electronics Engineers |
| Pages | 2934-2939 |
| Number of pages | 6 |
| ISBN (Electronic) | 978-1-5386-5428-6 |
| ISBN (Print) | 978-1-5386-5429-3 |
| DOIs | |
| Publication status | Published - 9 Aug 2018 |
| Event | 2018 American Control Conference (ACC 2018) - Hilton Milwaukee City Center Hotel, Milwaukee, Wisconsin, United States Duration: 27 Jun 2018 → 29 Jun 2018 http://acc2018.a2c2.org/ |
Conference
| Conference | 2018 American Control Conference (ACC 2018) |
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| Abbreviated title | ACC 2018 |
| Country/Territory | United States |
| City | Milwaukee, Wisconsin |
| Period | 27/06/18 → 29/06/18 |
| Internet address |