A microwave plasma model for a PCVD setup

M.J. Donker, van den, J. Dijk, van, M.J.N. Stralen, van, B.H.P. Broks, N. Vries, de, G.M. Janssen, J.J.A.M. Mullen, van der

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Abstract

A numerical model is constructed using the PLASIMO toolkit to simulate a microwave configuration which is similar to that which is in use for optical glass fiber prodn. The simulations offer the flow patterns and the electromagnetic (EM) energy incoupling of a two-temp. argon plasma. The Yee algorithm was used for the EM module, whereas the Semi implicit method for pressure linked equations algorithm was used to calc. the pressure and velocity field. It is found that at 400 W coupling of 2.46 GHz EM radiation in 1000 Pa argon results in a plasma that is not in local thermodn. equil., in the sense that Te/Th >= 4 and the ionization degree is smaller than that predicted by the Saha equations. The model results are subjected to various sanity checks. [on SciFinder (R)]
Original languageEnglish
Pages (from-to)2553-2564
JournalJournal of Physics D: Applied Physics
Volume39
Issue number12
DOIs
Publication statusPublished - 2006

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