A manufacturable sub-50nm PMOSFET technology

J. J.G.P. Loo, Y. V. Ponomarev, M. Kaiser, M. A. Verheijen, F. N. Cubaynes, C. J.J. Dachs

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science