A low-power CMOS integrated sensor for CO2 detection in the percentage range

A. Humbert, B.J. Tuerlings, R.J.O.M. Hoofman, Z. Tan, D.J. Gravesteijn, M.A.P. Pertijs, C.W.M. Bastiaansen, D. Soccol

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Abstract

Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1649-1652
Number of pages4
DOIs
Publication statusPublished - 2013
Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, June 16-20, 2013, Barcelona, Spain - Centro de Convenciones Internacional de Barcelona, Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
http://www.transducers-eurosensors2013.org/

Conference

Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, June 16-20, 2013, Barcelona, Spain
CountrySpain
CityBarcelona
Period16/06/1320/06/13
Internet address

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Keywords

  • capacitive transducer
  • CMOS compatible
  • CO sensor
  • low-power sensor
  • multi-sensor integration

Cite this

Humbert, A., Tuerlings, B. J., Hoofman, R. J. O. M., Tan, Z., Gravesteijn, D. J., Pertijs, M. A. P., ... Soccol, D. (2013). A low-power CMOS integrated sensor for CO2 detection in the percentage range. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1649-1652). [6627101] https://doi.org/10.1109/Transducers.2013.6627101