A low-power CMOS integrated sensor for CO2 detection in the percentage range

A. Humbert; B.J. Tuerlings; R.J.O.M. Hoofman; Z. Tan; D.J. Gravesteijn; M.A.P. Pertijs; C.W.M. Bastiaansen; D. Soccol

doi:10.1109/Transducers.2013.6627101

A low-power CMOS integrated sensor for CO2 detection in the percentage range

A. Humbert, B.J. Tuerlings, R.J.O.M. Hoofman, Z. Tan, D.J. Gravesteijn, M.A.P. Pertijs, C.W.M. Bastiaansen, D. Soccol

Stimuli-responsive Functional Materials & Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

7 Citations (Scopus)

2 Downloads (Pure)

Abstract

Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO₂ concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	1649-1652
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6627101
Publication status	Published - 2013
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Centro de Convenciones Internacional de Barcelona, Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 http://www.transducers-eurosensors2013.org/

Conference

Conference	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

capacitive transducer
CMOS compatible
CO sensor
low-power sensor
multi-sensor integration

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10.1109/Transducers.2013.6627101

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Humbert, A., Tuerlings, B. J., Hoofman, R. J. O. M., Tan, Z., Gravesteijn, D. J., Pertijs, M. A. P., Bastiaansen, C. W. M., & Soccol, D. (2013). A low-power CMOS integrated sensor for CO2 detection in the percentage range. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1649-1652). Article 6627101 https://doi.org/10.1109/Transducers.2013.6627101

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title = "A low-power CMOS integrated sensor for CO2 detection in the percentage range",

abstract = "Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.",

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author = "A. Humbert and B.J. Tuerlings and R.J.O.M. Hoofman and Z. Tan and D.J. Gravesteijn and M.A.P. Pertijs and C.W.M. Bastiaansen and D. Soccol",

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doi = "10.1109/Transducers.2013.6627101",

language = "English",

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note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

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Humbert, A, Tuerlings, BJ, Hoofman, RJOM, Tan, Z, Gravesteijn, DJ, Pertijs, MAP, Bastiaansen, CWM & Soccol, D 2013, A low-power CMOS integrated sensor for CO2 detection in the percentage range. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627101, pp. 1649-1652, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627101

A low-power CMOS integrated sensor for CO2 detection in the percentage range. / Humbert, A.; Tuerlings, B.J.; Hoofman, R.J.O.M. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1649-1652 6627101.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

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Humbert A, Tuerlings BJ, Hoofman RJOM, Tan Z, Gravesteijn DJ, Pertijs MAP et al. A low-power CMOS integrated sensor for CO2 detection in the percentage range. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1649-1652. 6627101 doi: 10.1109/Transducers.2013.6627101

A low-power CMOS integrated sensor for CO2 detection in the percentage range

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