A low-power CMOS integrated sensor for CO2 detection in the percentage range

A. Humbert, B.J. Tuerlings, R.J.O.M. Hoofman, Z. Tan, D.J. Gravesteijn, M.A.P. Pertijs, C.W.M. Bastiaansen, D. Soccol

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Abstract

Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

LanguageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1649-1652
Number of pages4
DOIs
StatePublished - 2013
Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, June 16-20, 2013, Barcelona, Spain - Centro de Convenciones Internacional de Barcelona, Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
http://www.transducers-eurosensors2013.org/

Conference

Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, June 16-20, 2013, Barcelona, Spain
CountrySpain
CityBarcelona
Period16/06/1320/06/13
Internet address

Fingerprint

Atmospheric humidity
Humidity sensors
Sensors
Carbon dioxide
Capacitance
Processing
Costs
Temperature

Keywords

  • capacitive transducer
  • CMOS compatible
  • CO sensor
  • low-power sensor
  • multi-sensor integration

Cite this

Humbert, A., Tuerlings, B. J., Hoofman, R. J. O. M., Tan, Z., Gravesteijn, D. J., Pertijs, M. A. P., ... Soccol, D. (2013). A low-power CMOS integrated sensor for CO2 detection in the percentage range. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1649-1652). [6627101] DOI: 10.1109/Transducers.2013.6627101
Humbert, A. ; Tuerlings, B.J. ; Hoofman, R.J.O.M. ; Tan, Z. ; Gravesteijn, D.J. ; Pertijs, M.A.P. ; Bastiaansen, C.W.M. ; Soccol, D./ A low-power CMOS integrated sensor for CO2 detection in the percentage range. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 1649-1652
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Humbert, A, Tuerlings, BJ, Hoofman, RJOM, Tan, Z, Gravesteijn, DJ, Pertijs, MAP, Bastiaansen, CWM & Soccol, D 2013, A low-power CMOS integrated sensor for CO2 detection in the percentage range. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627101, pp. 1649-1652, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, June 16-20, 2013, Barcelona, Spain, Barcelona, Spain, 16/06/13. DOI: 10.1109/Transducers.2013.6627101

A low-power CMOS integrated sensor for CO2 detection in the percentage range. / Humbert, A.; Tuerlings, B.J.; Hoofman, R.J.O.M.; Tan, Z.; Gravesteijn, D.J.; Pertijs, M.A.P.; Bastiaansen, C.W.M.; Soccol, D.

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1649-1652 6627101.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - Within the Catrene project PASTEUR, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO2 concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

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Humbert A, Tuerlings BJ, Hoofman RJOM, Tan Z, Gravesteijn DJ, Pertijs MAP et al. A low-power CMOS integrated sensor for CO2 detection in the percentage range. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1649-1652. 6627101. Available from, DOI: 10.1109/Transducers.2013.6627101