A layout defect-sensitivity extractor

J. Pineda de Gyvez; J.A.G. Jess

doi:10.1109/ICCAD.1989.77008

A layout defect-sensitivity extractor

J. Pineda de Gyvez, J.A.G. Jess

Electronic Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

192 Downloads (Pure)

Abstract

A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect size

Original language	English
Title of host publication	Proceedings of the 1989 IEEE International Conference on Computer-Aided Design, 1989, ICCAD-89, 5-9 November 1989, Santa Clara, California
Place of Publication	New York
Publisher	Institute of Electrical and Electronics Engineers
Pages	538-541
ISBN (Print)	0-8186-1986-4
DOIs	https://doi.org/10.1109/ICCAD.1989.77008
Publication status	Published - 1989

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10.1109/ICCAD.1989.77008

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title = "A layout defect-sensitivity extractor",

abstract = "A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect size",

author = "{Pineda de Gyvez}, J. and J.A.G. Jess",

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doi = "10.1109/ICCAD.1989.77008",

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A layout defect-sensitivity extractor. / Pineda de Gyvez, J.; Jess, J.A.G.

Proceedings of the 1989 IEEE International Conference on Computer-Aided Design, 1989, ICCAD-89, 5-9 November 1989, Santa Clara, California. New York : Institute of Electrical and Electronics Engineers, 1989. p. 538-541.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

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AU - Pineda de Gyvez, J.

AU - Jess, J.A.G.

PY - 1989

Y1 - 1989

N2 - A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect size

AB - A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect size

U2 - 10.1109/ICCAD.1989.77008

DO - 10.1109/ICCAD.1989.77008

M3 - Conference contribution

SN - 0-8186-1986-4

SP - 538

EP - 541

BT - Proceedings of the 1989 IEEE International Conference on Computer-Aided Design, 1989, ICCAD-89, 5-9 November 1989, Santa Clara, California

PB - Institute of Electrical and Electronics Engineers

CY - New York

ER -

A layout defect-sensitivity extractor

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