A layout defect-sensitivity extractor

J. Pineda de Gyvez, J.A.G. Jess

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
111 Downloads (Pure)

Abstract

A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect size
Original languageEnglish
Title of host publicationProceedings of the 1989 IEEE International Conference on Computer-Aided Design, 1989, ICCAD-89, 5-9 November 1989, Santa Clara, California
Place of PublicationNew York
PublisherInstitute of Electrical and Electronics Engineers
Pages538-541
ISBN (Print)0-8186-1986-4
DOIs
Publication statusPublished - 1989

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