A hydrogenated amorphous carbon coating

M. Creatore (Inventor), R. Groenen (Inventor), S.V. Singh (Inventor), M.C.M. Sanden, van de (Inventor), K. van Hege (Inventor)

Research output: PatentPatent publication

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Abstract

The invention relates to a hydrogenated amorphous carbon coating characterized by a substantial absence of spx hybridized CH x endgroups with x equal to 1, 2 and 3. The invention further relates to a method to deposit such a hydrogenated amorphous carbon coatingon a substrate.
Original languageEnglish
Patent numberWO2008095920
Publication statusPublished - 14 Aug 2008

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