Abstract
The invention relates to a hydrogenated amorphous carbon coating characterized by a substantial absence of spx hybridized CH x endgroups with x equal to 1, 2 and 3. The invention further relates to a method to deposit such a hydrogenated amorphous carbon coatingon a substrate.
Original language | English |
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Patent number | WO2008095920 |
Publication status | Published - 14 Aug 2008 |