A growth model for the fast deposition of a-Si:H

R.J. Severens, J. Bastiaanssen, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 43rd national symposium, Philapdelphia, October 14-18, 1996 : Abstracts
Publication statusPublished - 1996

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