A feasibility study on DeviceNet in ASML machine control

X. Pu, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Software Technology (ST)

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • van der Stok, Peter, External supervisor
    • Kok, de, B., External supervisor, External person
    Award date1 Jan 2000
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-444-0012-6
    Publication statusPublished - 2000

    Bibliographical note

    Eindverslag.

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