A fast multiplication algorithm for Gabor coefficients

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Abstract

Optical scatterometry is a fast, non-destructive, and accurate technique for monitoring integrated circuits (ICs) for defects during their lithographic production process. The detection of these defects with potentially sub-wavelength size hinges on the accurate scattered electromagnetic fields as provided by a Maxwell solver. Generating this information typically induces a heavy computational workload. To this end, it is key to develop computationally efficient Maxwell solvers, to provide this information in a fast and accurate manner as a means to safeguard the production quality of ICs.
Original languageEnglish
Title of host publication2024 International Conference on Electromagnetics in Advanced Applications, ICEAA 2024
PublisherInstitute of Electrical and Electronics Engineers
Pages242
Number of pages1
ISBN (Electronic)979-8-3503-6097-4
DOIs
Publication statusPublished - 8 Oct 2024
Event25th International Conference on Electromagnetics in Advanced Applications, ICEAA 2024 - Lisbon, Portugal
Duration: 2 Sept 20246 Sept 2024

Conference

Conference25th International Conference on Electromagnetics in Advanced Applications, ICEAA 2024
Abbreviated titleICEAA 2024
Country/TerritoryPortugal
CityLisbon
Period2/09/246/09/24

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