Abstract
Optical scatterometry is a fast, non-destructive, and accurate technique for monitoring integrated circuits (ICs) for defects during their lithographic production process. The detection of these defects with potentially sub-wavelength size hinges on the accurate scattered electromagnetic fields as provided by a Maxwell solver. Generating this information typically induces a heavy computational workload. To this end, it is key to develop computationally efficient Maxwell solvers, to provide this information in a fast and accurate manner as a means to safeguard the production quality of ICs.
Original language | English |
---|---|
Title of host publication | 2024 International Conference on Electromagnetics in Advanced Applications, ICEAA 2024 |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 242 |
Number of pages | 1 |
ISBN (Electronic) | 979-8-3503-6097-4 |
DOIs | |
Publication status | Published - 8 Oct 2024 |
Event | 25th International Conference on Electromagnetics in Advanced Applications, ICEAA 2024 - Lisbon, Portugal Duration: 2 Sept 2024 → 6 Sept 2024 |
Conference
Conference | 25th International Conference on Electromagnetics in Advanced Applications, ICEAA 2024 |
---|---|
Abbreviated title | ICEAA 2024 |
Country/Territory | Portugal |
City | Lisbon |
Period | 2/09/24 → 6/09/24 |