A diagnostic study on two low pressure plasma sources

M. Grift, van de

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • de Hoog, F.J., Promotor
  • Sadeghi, N., Promotor, External person
  • Kroesen, Gerrit M.W., Copromotor
Award date1 Dec 1997
Place of PublicationEindhoven
Publisher
Print ISBNs90-386-0597-8
DOIs
Publication statusPublished - 1997

Bibliographical note

Proefschrift.

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