TY - JOUR
T1 - A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma
AU - Kemaneci, E.
AU - Booth, J.P.
AU - Chabert, P.
AU - van Dijk, J.
AU - Mussenbrock, T.
AU - Brinkmann, R.P.
PY - 2016/3/10
Y1 - 2016/3/10
N2 - Vibrational levels of molecular oxygen, O2(v <42), are investigated in continuous and pulse-modulated low-pressure radio-frequency oxygen plasma with a global modelling approach. The model is benchmarked against a variety of pressure-, power- and time-resolved measurements of several inductive and asymmetric capacitive discharges available in the literature, and a good agreement is obtained. The sensitivity of the model with respect to the vibrational kinetics, the wall reactions and the spatial inhomogeneity of the charged particles are presented. The simulations without the vibrational levels are also shown for the sake of comparison.
AB - Vibrational levels of molecular oxygen, O2(v <42), are investigated in continuous and pulse-modulated low-pressure radio-frequency oxygen plasma with a global modelling approach. The model is benchmarked against a variety of pressure-, power- and time-resolved measurements of several inductive and asymmetric capacitive discharges available in the literature, and a good agreement is obtained. The sensitivity of the model with respect to the vibrational kinetics, the wall reactions and the spatial inhomogeneity of the charged particles are presented. The simulations without the vibrational levels are also shown for the sake of comparison.
UR - http://www.scopus.com/inward/record.url?scp=84962276251&partnerID=8YFLogxK
U2 - 10.1088/0963-0252/25/2/025025
DO - 10.1088/0963-0252/25/2/025025
M3 - Article
AN - SCOPUS:84962276251
SN - 0963-0252
VL - 25
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 2
M1 - 025025
ER -