A coaxial microwave discharge for thin film deposition

S. Hübner; J.M. Palomares Linares; J.J.A.M. Mullen, van der

A coaxial microwave discharge for thin film deposition

S. Hübner
, J.M. Palomares Linares
, J.J.A.M. Mullen, van der

Elementary Processes in Gas Discharges

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Change of title: Coaxial microwave source for solar cell production. Only abstract.

Original language	English
Title of host publication	Presentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands
Place of Publication	Kerkrade, The Netherlands
Pages	O3-
Publication status	Published - 2011
Event	14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011) - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 1 Dec 2011 → 2 Dec 2011 http://www.rd.ruhr-uni-bochum.de/imperia/md/content/rd/plasma/weltpp14.pdf

Workshop

Workshop	14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011)
Abbreviated title	WELTPP-14
Country/Territory	Netherlands
City	Kerkrade
Period	1/12/11 → 2/12/11
Internet address	http://www.rd.ruhr-uni-bochum.de/imperia/md/content/rd/plasma/weltpp14.pdf

Cite this

@inproceedings{6646dd8b87884d9496ca1b0130078252,

title = "A coaxial microwave discharge for thin film deposition",

abstract = "Change of title: Coaxial microwave source for solar cell production. Only abstract.",

author = "S. H{\"u}bner and \{Palomares Linares\}, J.M. and \{Mullen, van der\}, J.J.A.M.",

year = "2011",

language = "English",

pages = "O3--",

booktitle = "Presentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands",

note = "14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011), WELTPP-14 ; Conference date: 01-12-2011 Through 02-12-2011",

url = "http://www.rd.ruhr-uni-bochum.de/imperia/md/content/rd/plasma/weltpp14.pdf",

}

Hübner, S, Palomares Linares, JM & Mullen, van der, JJAM 2011, A coaxial microwave discharge for thin film deposition. in Presentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands. Kerkrade, The Netherlands, pp. O3-, 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011), Kerkrade, Netherlands, 1/12/11.

A coaxial microwave discharge for thin film deposition. / Hübner, S.; Palomares Linares, J.M.; Mullen, van der, J.J.A.M.
Presentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands. Kerkrade, The Netherlands, 2011. p. O3-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A coaxial microwave discharge for thin film deposition

AU - Hübner, S.

AU - Palomares Linares, J.M.

AU - Mullen, van der, J.J.A.M.

PY - 2011

Y1 - 2011

N2 - Change of title: Coaxial microwave source for solar cell production. Only abstract.

AB - Change of title: Coaxial microwave source for solar cell production. Only abstract.

M3 - Conference contribution

SP - O3-

BT - Presentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands

CY - Kerkrade, The Netherlands

T2 - 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011)

Y2 - 1 December 2011 through 2 December 2011

ER -

A coaxial microwave discharge for thin film deposition

Abstract

Workshop

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