A coaxial microwave discharge for thin film deposition

S. Hübner, J.M. Palomares Linares, J.J.A.M. Mullen, van der

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Abstract

Change of title: Coaxial microwave source for solar cell production. Only abstract.
Original languageEnglish
Title of host publicationPresentation at the 14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-14), 1-2 December 2011, Kerkrade, The Netherlands
Place of PublicationKerkrade, The Netherlands
PagesO3-
Publication statusPublished - 2011
Event14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011) - Conference centre "Rolduc", Kerkrade, Netherlands
Duration: 1 Dec 20112 Dec 2011
http://www.rd.ruhr-uni-bochum.de/imperia/md/content/rd/plasma/weltpp14.pdf

Workshop

Workshop14th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2011)
Abbreviated titleWELTPP-14
CountryNetherlands
CityKerkrade
Period1/12/112/12/11
Internet address

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