Fault diagnosis is crucial in high-tech production equipment to minimize operational downtime and to facilitate targeted maintenance. Future high-tech systems have numerous complex closed-loop control systems and require compatible fault diagnosis systems. The aim of this paper is to develop a procedure for decentralized fault detection in the presence of additional feedback interconnections. The influence of the additional feedback interconnections on the fault diagnosis system is investigated by means of an illustrative experimental study that resembles a next generation flexible motion system.
|Title of host publication||2021 IEEE International Conference on Mechatronics, ICM 2021|
|Publisher||Institute of Electrical and Electronics Engineers|
|Publication status||Published - 7 Mar 2021|
|Event||2021 IEEE International Conference on Mechatronics, ICM 2021 - Kashiwa, Japan|
Duration: 7 Mar 2021 → 9 Mar 2021
|Conference||2021 IEEE International Conference on Mechatronics, ICM 2021|
|Period||7/03/21 → 9/03/21|
Bibliographical noteFunding Information:
ACKNOWLEDGEMENT This work is supported by Topconsortia voor Kennis en Innovatie (TKI), and is supported by ASML Research, Veld-hoven, The Netherlands.
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