A closed-loop perspective on fault detection for precision motion control: With application to an overactuated system

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Abstract

Fault diagnosis is crucial in high-tech production equipment to minimize operational downtime and to facilitate targeted maintenance. Future high-tech systems have numerous complex closed-loop control systems and require compatible fault diagnosis systems. The aim of this paper is to develop a procedure for decentralized fault detection in the presence of additional feedback interconnections. The influence of the additional feedback interconnections on the fault diagnosis system is investigated by means of an illustrative experimental study that resembles a next generation flexible motion system.

Original languageEnglish
Title of host publication2021 IEEE International Conference on Mechatronics, ICM 2021
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Electronic)9781728144429
DOIs
Publication statusPublished - 7 Mar 2021
Event2021 IEEE International Conference on Mechatronics, ICM 2021 - Kashiwa, Japan
Duration: 7 Mar 20219 Mar 2021

Conference

Conference2021 IEEE International Conference on Mechatronics, ICM 2021
CountryJapan
CityKashiwa
Period7/03/219/03/21

Bibliographical note

Funding Information:
ACKNOWLEDGEMENT This work is supported by Topconsortia voor Kennis en Innovatie (TKI), and is supported by ASML Research, Veld-hoven, The Netherlands.

Publisher Copyright:
© 2021 IEEE.

Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.

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