a-C:H deposition : plasma physics, chemistry and material properties

J. Benedikt, K.G.Y. Letourneur, R.A.H. Engeln, M. Witte, D.C. Schram, M.C.M. van de Sanden

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationCIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes - Juan-les-Pins, France
Place of PublicationParis
PublisherSociété Française du Vide
Pages275-277
Publication statusPublished - 2001
Event13th International Colloquium on Plasma Processes (CIP 2001) - Antibes, France
Duration: 10 Jun 200114 Jun 2001

Publication series

NameVide: Science, Technique et Applications
PublisherSociété Française du Vide
Numberspecial
Volume51
ISSN (Print)1266-0167

Conference

Conference13th International Colloquium on Plasma Processes (CIP 2001)
Abbreviated titleCIP'2001
CountryFrance
CityAntibes
Period10/06/0114/06/01

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